Advantages and disadvantages of ceramic arm PK metal arm
1. Introduction of semiconductor products
Semiconductor products Industrial Ceramic Alumina are required to be very clean and pollution-free. In the production of semiconductor products, the requirements for the environment are very high, generally in strict dust-free workshops, and production personnel must wear anti-static clothing.
Semiconductor products are very delicate products, and some products are ultra-thin, only Alumina Ceramic Disc a few tenths of a millimeter or even thinner, so they are required to be handled with care. In processing and various treatments, there are high requirements for various clamping tools, clamping tools and utensils that contact semiconductor parts, mainly to not pollute the semiconductor parts, and these fixtures must also be able to withstand various acids. The test of alkali and heat treatment, so as to be durable.
2. Introduction of ceramic robotic arms for semiconductors
Robotic arm material: 99 alumina ceramics Alumina Ceramic Material are generally used.
Origin of the name of the ceramic manipulator: The ceramic manipulator is used to grab and clamp semiconductor parts, acting like a hand. It is designed as a flat arm and palm, so it is called a robotic arm.
The structure and function of the ceramic manipulator: There are air holes and ventilation slots in the manipulator. When the air is pumped, a vacuum can be formed, so as to absorb the semiconductor parts, so as to achieve light contact, no pinching, and no damage to the semiconductor parts sheet.
3. Compared with metal arms, the advantages of using ceramic arms to clamp semiconductor parts:
1. Ceramic robotic arms are more resistant to acid corrosion and alkali corrosion than metal arms. Longer service life during various semiconductor treatments;
2. The ceramic mechanical arm is not easy to react with other substances, and will not leave polluted fine particles and charged charges on the contacted items, and will not generate metal ions and contaminate semiconductor parts;
3. When the semiconductor is heat treated, the ceramic manipulator is less deformed by heat, which reduces the deformation of the semiconductor parts during heat treatment;
The application of ceramic materials can not only be used as a robotic arm for grasping and clamping semiconductor parts. According to the characteristics of ceramic insulation, high temperature resistance, no fear of acid, alkali, stable performance, and no pollution to contact products, it can be made into other parts used in harsh environments, and can be made into places where metals and plastics are incompetent.